Patents

Japan


2002 High frequency wattmeter for transmission line
2008 Coaxial microwave plasma torch
2010 Plasma generator,ozone generator,substrate processing apparatus and manufacturing method of semiconductor device
2010 Microwave plasma generation method and microwave plasma generator
2011 Object processing apparatus and plasma facility comprising the same
2011 Impedance automatic matching method
2012 Plasma generating electrode and plasma generating method

USA


1995 High frequency plasma power source and impedance matching device for supplying power to a semiconductor processing apparatus
1999 System for impedance matching and power control for apparatus for high frequency plasma treatment
2008 Object processing apparatus and plasma facility comprising the same
2009 Plasma generator,ozone generator,substrate processing apparatus and manufacturing method of semiconductor device
2010 Microwave plasma generation method and microwave plasma generator
2010 Coaxial microwave plasma torch

France


2007 Object processing apparatus and plasma facility comprising the same

UK


2007 Object processing apparatus and plasma facility comprising the same

Germany


2007 Object processing apparatus and plasma facility comprising the same

Korea


2007 Object processing apparatus and plasma facility comprising the same

Japan (Trademark)


2008 ADline                                                                                                   

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